1

Modeling and Fabrication of Micro FET Pressure Sensor with Circuits

Year:
2007
Language:
english
File:
PDF, 2.27 MB
english, 2007
7

Manufacture of Micromirror Arrays Using a CMOS-MEMS Technique

Year:
2009
Language:
english
File:
PDF, 496 KB
english, 2009
8

Micro FET pressure sensor manufactured using CMOS-MEMS technique

Year:
2008
Language:
english
File:
PDF, 1.15 MB
english, 2008
9

Fabrication and Characterization of CMOS-MEMS Thermoelectric Micro Generators

Year:
2010
Language:
english
File:
PDF, 586 KB
english, 2010